MeV heavy ion beam induced epitaxial crystallization of...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2006 Vol. 244; Iss. 1

MeV heavy ion beam induced epitaxial crystallization of buried Si3N4 layer

T. Som, B. Satpati, O.P. Sinha, N.C. Mishra, D. Kanjilal
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Volume:
244
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2005.11.037
File:
PDF, 195 KB
english, 2006
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