Study of ion beam induced mixing in nano-layered Si/C...

Study of ion beam induced mixing in nano-layered Si/C multilayer structures

Ram Prakash, S. Amirthapandian, D.M. Phase, S.K. Deshpande, R. Kesavamoorthy, K.G.M. Nair
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Volume:
244
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.nimb.2005.11.044
File:
PDF, 266 KB
english, 2006
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