A silicon electrostatic ultrasonic transducer

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 1989 / 11 Vol. 36; Iss. 6

A silicon electrostatic ultrasonic transducer

Suzuki, K., Higuchi, K., Tanigawa, H.
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Volume:
36
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/58.39112
Date:
November, 1989
File:
PDF, 968 KB
english, 1989
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