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A silicon electrostatic ultrasonic transducer
Suzuki, K., Higuchi, K., Tanigawa, H.Volume:
36
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/58.39112
Date:
November, 1989
File:
PDF, 968 KB
english, 1989