Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2006 Vol. 246; Iss. 1
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X-ray absorption spectroscopy study of Yb2O3 and Lu2O3 thin films deposited on Si(1 0 0) by atomic layer deposition
M. Malvestuto, G. Scarel, C. Wiemer, M. Fanciulli, F. D’Acapito, F. BoscheriniVolume:
246
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.nimb.2005.12.020
File:
PDF, 345 KB
english, 2006