Characteristics of Al doped zinc oxide (ZAO) thin films...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2006 Vol. 249; Iss. 1-2

Characteristics of Al doped zinc oxide (ZAO) thin films deposited by RF magnetron sputtering

Satoshi Kobayakawa, Yoshikazu Tanaka, Ari Ide-Ektessabi
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Volume:
249
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2006.03.047
File:
PDF, 259 KB
english, 2006
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