[IEEE 2011 Materials for Advanced Metallization (MAM) -...

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[IEEE 2011 Materials for Advanced Metallization (MAM) - Dresden, Germany (2011.05.8-2011.05.12)] 2011 IEEE International Interconnect Technology Conference - Investigation of ultra-thin Al2O3 film as Cu diffusion barrier on low-k (k=2.5) dielectrics

Ding, Shao-Feng, Xie, Qi, Chen, Fei, Lu, Hai-Sheng, Deng, Shao-Ren, Detavernier, Christophe, Ru, Guo-Ping, Jiang, Yu-Long, Qu, Xin-Ping
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Year:
2011
Language:
english
DOI:
10.1109/iitc.2011.5940321
File:
PDF, 474 KB
english, 2011
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