Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2006 Vol. 249; Iss. 1-2
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Effect of pre-implanted oxygen in Si on the retention of implanted He
A. Manuaba, F. Pászti, A.R. Ramos, N.Q. Khánh, B. Pécz, Z. Zolnai, A. Tunyogi, E. SzilágyiVolume:
249
Year:
2006
Language:
english
Pages:
3
DOI:
10.1016/j.nimb.2006.03.102
File:
PDF, 215 KB
english, 2006