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Effects of outgassing of loader chamber walls on hydriding of thin films for commercial applications
Provo, James L.Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4881982
Date:
July, 2014
File:
PDF, 2.07 MB
english, 2014