Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2006 Vol. 249; Iss. 1-2
Study of hydrogen stability in low-k dielectric films by ion beam techniques
Y. Zhang, L. Saraf, V. Shutthanandan, K.D. Hughes, R. Kuan, S. ThevuthasanVolume:
249
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2006.04.022
File:
PDF, 232 KB
english, 2006