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[IEEE Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems - EuroSimE 2004 - Brussels, Belgium (10-12 May 2004)] 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, 2004. EuroSimE 2004. Proceedings of the - State of the art in prediction of mechanical behaviour of microsystems [MEMS]
Lishchynska, M., Cordero, N., Slattery, O.Year:
2004
Language:
english
DOI:
10.1109/esime.2004.1304052
File:
PDF, 748 KB
english, 2004