Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2006 Vol. 253; Iss. 1-2
Experimental measurement of in-depth secondary defects distribution produced by helium implantation in silicon
S. Daliento, L. Mele, P. Spirito, L. Gialanella, B.N. Limata, M. RomanoVolume:
253
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2006.10.021
File:
PDF, 207 KB
english, 2006