Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2006 Vol. 253; Iss. 1-2
Hydrogen dilution effect on microstructure of Si thin film grown by catalyzer enhanced chemical vapor deposition
Han-Ki KimVolume:
253
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2006.10.041
File:
PDF, 926 KB
english, 2006