Hydrogen dilution effect on microstructure of Si thin film...

Hydrogen dilution effect on microstructure of Si thin film grown by catalyzer enhanced chemical vapor deposition

Han-Ki Kim
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Volume:
253
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2006.10.041
File:
PDF, 926 KB
english, 2006
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