Metal and organic contamination effects on the...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2006 Vol. 253; Iss. 1-2

Metal and organic contamination effects on the characteristics of thin oxides thermally grown on silicon based wafers

G. Borionetti, P. Geranzani, R. Orizio, P. Godio, F. Bonoli, F. Pagani, C. Pello’
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Volume:
253
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2006.10.060
File:
PDF, 237 KB
english, 2006
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