Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2007 Vol. 254; Iss. 1
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Evidence for a dose dependence for thermal redistribution of implanted silicon in SiO2
Daniel Mathiot, Michele Perego, Marco Fanciulli, Gérard Ben AssayagVolume:
254
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2006.10.077
File:
PDF, 431 KB
english, 2007