Study of focused ion beam response of GaSb

Study of focused ion beam response of GaSb

A. Lugstein, C. Schoendorfer, M. Weil, C. Tomastik, A. Jauss, E. Bertagnolli
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Volume:
255
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2006.11.116
File:
PDF, 700 KB
english, 2007
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