Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2007 Vol. 256; Iss. 1
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A study of amorphization energies in silicon for different implantation parameters
E. FriedlandVolume:
256
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.nimb.2006.12.002
File:
PDF, 298 KB
english, 2007