Validation of the Compatibility Between a Porous...

IEEE Sensors Journal 2010 / 04 Vol. 10; Iss. 4

Validation of the Compatibility Between a Porous Silicon-Based Gas Sensor Technology and Standard Microelectronic Process

Barillaro, G., Bruschi, P., Lazzerini, G. M., Strambini, L. M.
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Volume:
10
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/jsen.2009.2034861
Date:
April, 2010
File:
PDF, 566 KB
english, 2010
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