Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2007 Vol. 256; Iss. 1
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Nanofabrication on a Si surface by slow highly charged ion impact
Masahide Tona, Hirofumi Watanabe, Satoshi Takahashi, Nobuyuki Nakamura, Nobuo Yoshiyasu, Makoto Sakurai, Toshifumi Terui, Shinro Mashiko, Chikashi Yamada, Shunsuke OhtaniVolume:
256
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2006.12.057
File:
PDF, 431 KB
english, 2007