Reactive ion etching of sol-gel deposited lead zirconate...

Integrated Ferroelectrics 2001 / 01 Vol. 37; Iss. 1-4

Reactive ion etching of sol-gel deposited lead zirconate titanate (pzt) thin films in sf 6 plasmas

McLane, George, Polcawich, Ronald, Pulskamp, Jeffrey, Piekarski, Brett, Dubey, Madan, Zakar, Eugene, Conrad, John, Piekarz, Richard, Ervin, Matthew, Wood, Mark
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Volume:
37
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580108015666
Date:
January, 2001
File:
PDF, 649 KB
english, 2001
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