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[IEEE 2001 6th International Workshop on Statistical Methodology - Kyoto, Japan (10 June 2001)] 2001 6th International Workshop on Statistical Methodology (Cat. No.01TH8550) - Scaling variance, invariance and prediction of design rule: from 0.25-μm to 0.10-μm nodes in the era of foundry manufacturing
Doong, K.Y.-Y., Ting, J.K., Sunnys Hsieh,, Lin, S.C., Binson Shen,, Guo, J.C., Young, K.L., Chen, I.C., Sun, J.Y.C., Wang, J.K.Year:
2001
Language:
english
DOI:
10.1109/iwstm.2001.933822
File:
PDF, 403 KB
english, 2001