Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2007 Vol. 257; Iss. 1-2
Modifications of AlN thin films by ions
N. Matsunami, T. Shimura, M. Tazawa, T. Kusumori, H. Kakiuchida, M. Ikeyama, Y. Chimi, M. SatakaVolume:
257
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2007.01.043
File:
PDF, 894 KB
english, 2007