Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2007 Vol. 257; Iss. 1-2
Effects of ion implantation on the surface mechanical properties of sol–gel derived TEOS/MTES thin films
D.A. Lucca, R. Ghisleni, M. Nastasi, L. Shao, Y.Q. Wang, J. Dong, A. MehnerVolume:
257
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2007.01.062
File:
PDF, 287 KB
english, 2007