Ion implantation induced structural changes in reactively...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2007 Vol. 257; Iss. 1-2

Ion implantation induced structural changes in reactively sputtered Cr-N layers on Si substrates

M. Novaković, M. Popović, D. Peruško, V. Milinović, I. Radović, N. Bibić, M. Mitrić, M. Milosavljević
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Volume:
257
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2007.01.112
File:
PDF, 259 KB
english, 2007
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