Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2007 Vol. 257; Iss. 1-2
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Nanocavities induced by neon Plasma Based Ion Implantation in silicon
M.F. Beaufort, J.F. Barbot, M. Drouet, S. Peripolli, E. Oliviero, L. Amaral, P.F.P. FichtnerVolume:
257
Year:
2007
Language:
english
Pages:
3
DOI:
10.1016/j.nimb.2007.01.128
File:
PDF, 976 KB
english, 2007