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Materials Selection and Design of Microelectrothermal Bimaterial Actuators
Prasanna, Srinivasan, Spearing, S. MarkVolume:
16
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2006.889528
Date:
April, 2007
File:
PDF, 589 KB
english, 2007