Sidewall quality in proton beam writing

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2007 Vol. 260; Iss. 1

Sidewall quality in proton beam writing

S.Y. Chiam, J.A. van Kan, T. Osipowicz, C.N.B. Udalagama, F. Watt
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Volume:
260
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2007.02.012
File:
PDF, 569 KB
english, 2007
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