Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2007 Vol. 260; Iss. 1
![](/img/cover-not-exists.png)
Study of crystal damage by ion implantation using micro RBS/channeling
D. Grambole, F. Herrmann, V. Heera, J. MeijerVolume:
260
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2007.02.034
File:
PDF, 506 KB
english, 2007