Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2007 Vol. 260; Iss. 1
![](/img/cover-not-exists.png)
Fabrication of micro-structured tunnels in PMMA using P-beam writing
B. Rout, M. Kamal, A.D. Dymnikov, D.P. Zachry, G.A. GlassVolume:
260
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.nimb.2007.02.048
File:
PDF, 1.08 MB
english, 2007