Fabrication of micro-structured tunnels in PMMA using...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2007 Vol. 260; Iss. 1

Fabrication of micro-structured tunnels in PMMA using P-beam writing

B. Rout, M. Kamal, A.D. Dymnikov, D.P. Zachry, G.A. Glass
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Volume:
260
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.nimb.2007.02.048
File:
PDF, 1.08 MB
english, 2007
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