Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2007 Vol. 260; Iss. 1
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Concept for processing of silicon check valves by proton beam micromachining
Cs. Dücso˝, I. Rajta, P. Fürjes, E. BaradácsVolume:
260
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2007.02.054
File:
PDF, 800 KB
english, 2007