Concept for processing of silicon check valves by proton...

Concept for processing of silicon check valves by proton beam micromachining

Cs. Dücso˝, I. Rajta, P. Fürjes, E. Baradács
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
260
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2007.02.054
File:
PDF, 800 KB
english, 2007
Conversion to is in progress
Conversion to is failed