Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2007 Vol. 260; Iss. 1
Proton beam micromachined buried microchannels in negative tone resist materials
I. Rajta, M. Chatzichristidi, E. Baradács, C. Cserháti, I. Raptis, K. Manoli, E.S. ValamontesVolume:
260
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2007.02.055
File:
PDF, 622 KB
english, 2007