Proton beam writing of submicrometer structures at LIPSION

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2007 Vol. 260; Iss. 1

Proton beam writing of submicrometer structures at LIPSION

F. Menzel, D. Spemann, S. Petriconi, J. Lenzner, T. Butz
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Volume:
260
Year:
2007
Language:
english
Pages:
7
DOI:
10.1016/j.nimb.2007.02.056
File:
PDF, 1.92 MB
english, 2007
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