Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2007 Vol. 260; Iss. 1
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Ion beam lithograpy using a nano-aperture
M.L. Taylor, A. Alves, P. Reichart, R.D. Franich, S. Rubanov, P. Johnston, D.N. JamiesonVolume:
260
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2007.02.057
File:
PDF, 569 KB
english, 2007