Maskless proton beam writing in gallium arsenide

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2007 Vol. 260; Iss. 1

Maskless proton beam writing in gallium arsenide

P. Mistry, I. Gomez-Morilla, R.C. Smith, D. Thomson, G.W. Grime, R.P. Webb, R. Gwilliam, C. Jeynes, A. Cansell, M. Merchant, K.J. Kirkby
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Volume:
260
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2007.02.059
File:
PDF, 336 KB
english, 2007
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