Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2007 Vol. 260; Iss. 1
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Porous silicon microcavities fabricated using ion irradiation
D. Mangaiyarkarasi, M.B.H. Breese, O.Y. Sheng, D.J. BlackwoodVolume:
260
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2007.02.061
File:
PDF, 2.13 MB
english, 2007