Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2007 Vol. 260; Iss. 1
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New resists for proton beam writing
J.A. van Kan, A.A. Bettiol, S.Y. Chiam, M.S.M. Saifullah, K.R.V. Subramanian, M.E. Welland, F. WattVolume:
260
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2007.02.063
File:
PDF, 823 KB
english, 2007