Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2007 Vol. 260; Iss. 1
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Polymer microlens replication by Nanoimprint Lithography using proton beam fabricated Ni stamp
R.K. Dutta, J.A. van Kan, A.A. Bettiol, F. WattVolume:
260
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2007.02.064
File:
PDF, 326 KB
english, 2007