Fabrication of free standing resolution standards using...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2007 Vol. 260; Iss. 1

Fabrication of free standing resolution standards using proton beam writing

F. Zhang, J.A. van Kan, S.Y. Chiam, F. Watt
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Volume:
260
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2007.02.065
File:
PDF, 1.10 MB
english, 2007
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