Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2007 Vol. 260; Iss. 1
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The rapid secondary electron imaging system of the proton beam writer at CIBA
C.N.B. Udalagama, A.A. Bettiol, J.A. van Kan, E.J. Teo, F. WattVolume:
260
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.nimb.2007.02.112
File:
PDF, 1.05 MB
english, 2007