A Monte Carlo study of the extent of proximity effects in...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2007 Vol. 260; Iss. 1

A Monte Carlo study of the extent of proximity effects in e-beam and p-beam writing of PMMA

C.N.B. Udalagama, A.A. Bettiol, F. Watt
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Volume:
260
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.nimb.2007.02.113
File:
PDF, 1.27 MB
english, 2007
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