Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2007 Vol. 261; Iss. 1-2
Low-damage processing using size-controlled gas cluster ion beams
Noriaki Toyoda, Isao YamadaVolume:
261
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2007.04.107
File:
PDF, 477 KB
english, 2007