Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2007 Vol. 261; Iss. 1-2
Advanced surface polishing using gas cluster ion beams
Z. Insepov, A. Hassanein, J. Norem, D.R. SwensonVolume:
261
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2007.04.134
File:
PDF, 507 KB
english, 2007