Near-Field Scanning Microwave Microscope for Interline Capacitance Characterization of Nanoelectronics Interconnect
Talanov, V.V., Schwartz, A.R.Volume:
57
Language:
english
Journal:
IEEE Transactions on Microwave Theory and Techniques
DOI:
10.1109/TMTT.2009.2017352
Date:
May, 2009
File:
PDF, 574 KB
english, 2009