Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2007 Vol. 261; Iss. 1-2
Fluoride thin film formation with low optical absorption by gas cluster ion beam assisted deposition
S. Nakazawa, N. Toyoda, K. Mochiji, T. Mitamura, I. YamadaVolume:
261
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2007.04.267
File:
PDF, 491 KB
english, 2007