Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2007 Vol. 263; Iss. 2
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Preparation of Al thin films charged with helium by DC magnetron sputtering
Jian-ping Jia, Li-qun Shi, Xin-chun Lai, Qing-fu WangVolume:
263
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2007.06.022
File:
PDF, 438 KB
english, 2007