Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2008 Vol. 266; Iss. 8
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HRBS/channeling studies of ultra-thin ITO films on Si
P. Malar, T.K. Chan, C.S. Ho, T. OsipowiczVolume:
266
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2007.11.022
File:
PDF, 153 KB
english, 2008