[IEEE 2013 e-Manufacturing & Design Collaboration Symposium (eMDC) - Hsinchu, Taiwan (2013.9.6-2013.9.6)] 2013 e-Manufacturing & Design Collaboration Symposium (eMDC) - Conversion from helium to nitrogen as a TEOS carrier gas in sub-atmospheric chemical vapor deposition
Murata, Tatsunori, Ohtsuka, Masashi, Hotta, Katsuhiko, Fujisawa, MasahikoYear:
2013
Language:
english
DOI:
10.1109/emdc.2013.6756057
File:
PDF, 536 KB
english, 2013