The energy dependence of sputtering induced ripple...

The energy dependence of sputtering induced ripple topography in Al film

P. Mishra, D. Ghose
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Volume:
266
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.nimb.2007.11.069
File:
PDF, 559 KB
english, 2008
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