FTIR and RBS study of ion-beam synthesized buried silicon...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2008 Vol. 266; Iss. 8

FTIR and RBS study of ion-beam synthesized buried silicon oxide layers

A.P. Patel, A.D. Yadav, S.K. Dubey, B.K. Panigrahi, K.G.M. Nair
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Volume:
266
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2007.12.048
File:
PDF, 171 KB
english, 2008
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