Modification of the etching properties of x-cut Lithium...

Modification of the etching properties of x-cut Lithium Niobate by ion implantation

M. Bianconi, F. Bergamini, G.G. Bentini, A. Cerutti, M. Chiarini, P. De Nicola, G. Pennestrì
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Volume:
266
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2007.12.051
File:
PDF, 105 KB
english, 2008
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