Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2008 Vol. 266; Iss. 8
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Structural characterization of buried nitride layers formed by nitrogen ion implantation in silicon
A.D. Yadav, A.P. Patel, S.K. Dubey, B.K. Panigrahi, R. Kesavamoorthy, K.G.M. NairVolume:
266
Year:
2008
Language:
english
Pages:
3
DOI:
10.1016/j.nimb.2007.12.053
File:
PDF, 190 KB
english, 2008